The possibility of AlGaAs nanowires MBE growth on a silicon substrate with a nanometer silicon carbide buffer layer was demonstrated for the first time. Under the same experimental conditions (including the same composition), the diameter of the AlGaAs/SiC/Si nanowires are smaller than nanowires diameter grown on a silicon substrate. Based on the photoluminescence analysis suggests that when AlGaAs/SiC/Si NWs are grown, a physical complex structure appears due to the self-organized formation of regions with different molar fractions of aluminum in the solid solution.