Dautov, A. M.,
Sibirev, N. V.,
Fedorov, V. V.,
Kharchenko, A. A.,
Terpitskiy, A. N.,
Sattorov, M. S.,
Spivak, Y. M.,
Vasilkova, E. I.,
Miniv, D. V.,
Shugabaev, T.,
Andreeva, A. S.,
Lendyashova, V. V.,
Timur, K. D.,
Kuznetsov, A.,
Shtrom, I. V.,
Reznik, R. R.,
Cirlin, G. E. &
Gridchin, V. O.,
1 Nov 2026,
In: Materials Science in Semiconductor Processing. 214, 110925.
Research output: Contribution to journal › Article › peer-review