DOI

The possibility of the controlled removal of GaN nanowires (NWs) from an SiOx inhibitor layer of patterned SiOx/Si substrates has been demonstrated. It has been found that the wet KOH etching preserves the selectively grown GaN NWs on Si surface, whereas the GaN NWs grown on inhibitor SiOx layer are removing. The effect is described by the difference in polarity between GaN NWs grown on a Si surface and NWs grown on a SiOx inhibitor layer.

Язык оригиналаанглийский
Номер статьи012098
ЖурналJournal of Physics: Conference Series
Том2103
Номер выпуска1
DOI
СостояниеОпубликовано - 14 дек 2021
СобытиеInternational conference PhysicA.SPb/2021 - Санкт-Петербург, Российская Федерация
Продолжительность: 18 окт 202122 окт 2021
http://physica.spb.ru/

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  • Физика и астрономия (все)

ID: 96851064