Research output: Contribution to journal › Conference article › peer-review
The possibility of the controlled removal of GaN nanowires (NWs) from an SiOx inhibitor layer of patterned SiOx/Si substrates has been demonstrated. It has been found that the wet KOH etching preserves the selectively grown GaN NWs on Si surface, whereas the GaN NWs grown on inhibitor SiOx layer are removing. The effect is described by the difference in polarity between GaN NWs grown on a Si surface and NWs grown on a SiOx inhibitor layer.
Original language | English |
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Article number | 012098 |
Journal | Journal of Physics: Conference Series |
Volume | 2103 |
Issue number | 1 |
DOIs | |
State | Published - 14 Dec 2021 |
Event | International Conference PhysicA.SPb/2021 - Санкт-Петербург, Russian Federation Duration: 18 Oct 2021 → 22 Oct 2021 http://physica.spb.ru/ |
ID: 96851064