The possibility of the controlled removal of GaN nanowires (NWs) from an SiOx inhibitor layer of patterned SiOx/Si substrates has been demonstrated. It has been found that the wet KOH etching preserves the selectively grown GaN NWs on Si surface, whereas the GaN NWs grown on inhibitor SiOx layer are removing. The effect is described by the difference in polarity between GaN NWs grown on a Si surface and NWs grown on a SiOx inhibitor layer.

Original languageEnglish
Article number012098
JournalJournal of Physics: Conference Series
Volume2103
Issue number1
DOIs
StatePublished - 14 Dec 2021
EventInternational Conference PhysicA.SPb/2021 - Санкт-Петербург, Russian Federation
Duration: 18 Oct 202122 Oct 2021
http://physica.spb.ru/

    Scopus subject areas

  • Physics and Astronomy(all)

ID: 96851064