Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Selective-Area Growth of GaN Nanowires on Patterned SiO x/Si Substrates by Molecular Beam Epitaxy. / Gridchin, V. O.; Kotlyar, K. P.; Reznik, R. R.; Dvoretskaya, L. N.; Parfen’eva, A. V.; Mukhin, I. S.; Cirlin, G. E.
в: Technical Physics Letters, Том 46, № 11, 11.2020, стр. 1080-1083.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Selective-Area Growth of GaN Nanowires on Patterned SiO x/Si Substrates by Molecular Beam Epitaxy
AU - Gridchin, V. O.
AU - Kotlyar, K. P.
AU - Reznik, R. R.
AU - Dvoretskaya, L. N.
AU - Parfen’eva, A. V.
AU - Mukhin, I. S.
AU - Cirlin, G. E.
N1 - Publisher Copyright: © 2020, Pleiades Publishing, Ltd.
PY - 2020/11
Y1 - 2020/11
N2 - Abstract: We demonstrate the possibility of selective-area growth of ordered arrays of GaN nanowires by molecular beam epitaxy on SiOx/Si substrates patterned by photolithography with microspherical lenses without the preliminary formation of seed layers. The effect of the substrate temperature on the morphological properties of the obtained arrays of nanowitres is studied. The optimal growth parameters ensuring the selective-area growth of GaN nanowires are experimentally found.
AB - Abstract: We demonstrate the possibility of selective-area growth of ordered arrays of GaN nanowires by molecular beam epitaxy on SiOx/Si substrates patterned by photolithography with microspherical lenses without the preliminary formation of seed layers. The effect of the substrate temperature on the morphological properties of the obtained arrays of nanowitres is studied. The optimal growth parameters ensuring the selective-area growth of GaN nanowires are experimentally found.
KW - GaN
KW - microsphere lithography
KW - molecular beam epitaxy
KW - morphological properties
KW - nanowires
KW - selective-area growth
UR - http://www.scopus.com/inward/record.url?scp=85104573888&partnerID=8YFLogxK
U2 - 10.1134/S1063785020110061
DO - 10.1134/S1063785020110061
M3 - Article
AN - SCOPUS:85104573888
VL - 46
SP - 1080
EP - 1083
JO - Technical Physics Letters
JF - Technical Physics Letters
SN - 1063-7850
IS - 11
ER -
ID: 97045333