Nonstationary capacitance spectroscopy (DLTS) is widely used in determining deep-level parameters for semiconductors. In application to dislocations, an important point in that the method in particular enables one to isolate the lines corresponding to extended defects. Also, the working volume is determined by the thickness of the depleted region in a Schottky diode and the contact area, so it can be extremely small, and therefore microindentation can be used to introduce dislocations, while one can also examine unevenly distributed growth dislocations. We have applied DLTS to cadmium sulfide and have identified signals in the spectra corresponding to certain dislocation types.

Original languageEnglish
Pages (from-to)39-43
Number of pages5
JournalBulletin of the Academy of Sciences of the U.S.S.R. Physical series
Volume51
Issue number4
StatePublished - 1986
EventProc of the Fifth Int Conf on the Prop and Struct of Dislocat in Semicond - Moscow, USSR
Duration: 17 Mar 198622 Mar 1986

    Scopus subject areas

  • Engineering(all)

ID: 75077004