Research output: Contribution to journal › Article › peer-review
| Translated title of the contribution | Molecular Layering Synthesis and Investigation of Nanostructured Oxide Layers in High Aspect Ratio Substrates |
|---|---|
| Original language | Russian |
| Pages (from-to) | 61-71 |
| Number of pages | 11 |
| Journal | Известия высших учебных заведений России. Радиоэлектроника |
| Volume | 27 |
| Issue number | 4 |
| DOIs | |
| State | Published - 28 Sep 2024 |
ID: 125310802