Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Universal automated complex for element and structural analysis of a surface. / Denisov, V. P.; Egorov, N. V.; Ovsyannikov, A. M.; Ovsyannikov, D. A.; Tolstyakov, V. R.; Shaporenko, A. A.
в: Pribory i Tekhnika Eksperimenta, № 3, 01.05.1995.Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
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TY - JOUR
T1 - Universal automated complex for element and structural analysis of a surface
AU - Denisov, V. P.
AU - Egorov, N. V.
AU - Ovsyannikov, A. M.
AU - Ovsyannikov, D. A.
AU - Tolstyakov, V. R.
AU - Shaporenko, A. A.
PY - 1995/5/1
Y1 - 1995/5/1
N2 - The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.
AB - The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.
UR - http://www.scopus.com/inward/record.url?scp=0029296538&partnerID=8YFLogxK
M3 - статья
AN - SCOPUS:0029296538
JO - ПРИБОРЫ И ТЕХНИКА ЭКСПЕРИМЕНТА
JF - ПРИБОРЫ И ТЕХНИКА ЭКСПЕРИМЕНТА
SN - 0032-8162
IS - 3
ER -
ID: 32916603