The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.