Standard

Universal automated complex for element and structural analysis of a surface. / Denisov, V. P.; Egorov, N. V.; Ovsyannikov, A. M.; Ovsyannikov, D. A.; Tolstyakov, V. R.; Shaporenko, A. A.

In: Pribory i Tekhnika Eksperimenta, No. 3, 01.05.1995.

Research output: Contribution to journal › Article › peer-review

Harvard

Denisov, VP, Egorov, NV, Ovsyannikov, AM, Ovsyannikov, DA, Tolstyakov, VR & Shaporenko, AA 1995, 'Universal automated complex for element and structural analysis of a surface', Pribory i Tekhnika Eksperimenta, no. 3.

APA

Denisov, V. P., Egorov, N. V., Ovsyannikov, A. M., Ovsyannikov, D. A., Tolstyakov, V. R., & Shaporenko, A. A. (1995). Universal automated complex for element and structural analysis of a surface. Pribory i Tekhnika Eksperimenta, (3).

Vancouver

Denisov VP, Egorov NV, Ovsyannikov AM, Ovsyannikov DA, Tolstyakov VR, Shaporenko AA. Universal automated complex for element and structural analysis of a surface. Pribory i Tekhnika Eksperimenta. 1995 May 1;(3).

Author

Denisov, V. P. ; Egorov, N. V. ; Ovsyannikov, A. M. ; Ovsyannikov, D. A. ; Tolstyakov, V. R. ; Shaporenko, A. A. / Universal automated complex for element and structural analysis of a surface. In: Pribory i Tekhnika Eksperimenta. 1995 ; No. 3.

BibTeX

@article{c5af3051ba8a45e4a64b992dc88c26a7,
title = "Universal automated complex for element and structural analysis of a surface",
abstract = "The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.",
author = "Denisov, {V. P.} and Egorov, {N. V.} and Ovsyannikov, {A. M.} and Ovsyannikov, {D. A.} and Tolstyakov, {V. R.} and Shaporenko, {A. A.}",
year = "1995",
month = may,
day = "1",
language = "русский",
journal = "ПРИБОРЫ И ТЕХНИКА ЭКСПЕРИМЕНТА",
issn = "0032-8162",
publisher = "Издательство {"}Наука{"}",
number = "3",

}

RIS

TY - JOUR

T1 - Universal automated complex for element and structural analysis of a surface

AU - Denisov, V. P.

AU - Egorov, N. V.

AU - Ovsyannikov, A. M.

AU - Ovsyannikov, D. A.

AU - Tolstyakov, V. R.

AU - Shaporenko, A. A.

PY - 1995/5/1

Y1 - 1995/5/1

N2 - The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.

AB - The complex is intended for usage in research and industrial laboratories, specialized in microelectronics, catalysis, developing structural materials etc. The complex is based on a superhigh-vacuum chamber with a monopole mass analyzer, four-grid system for observation of slow electron diffraction patterns, and electron energy analyzer. The system is connected to a plasmatron source of ions with the energy up to 20 keV. The complex has a control system, ensuring self-consistency of results of analysis, fulfilled by the methods of Auger spectroscopy, characteristic loss spectroscopy, slow electron diffraction etc.

UR - http://www.scopus.com/inward/record.url?scp=0029296538&partnerID=8YFLogxK

M3 - статья

AN - SCOPUS:0029296538

JO - ПРИБОРЫ И ТЕХНИКА ЭКСПЕРИМЕНТА

JF - ПРИБОРЫ И ТЕХНИКА ЭКСПЕРИМЕНТА

SN - 0032-8162

IS - 3

ER -

ID: 32916603