Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.
Язык оригинала | английский |
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Страницы (с-по) | 315-318 |
Число страниц | 4 |
Журнал | Journal of Optical Technology (A Translation of Opticheskii Zhurnal) |
Том | 82 |
Номер выпуска | 5 |
DOI | |
Состояние | Опубликовано - 2015 |
ID: 86117363