DOI

This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.

Язык оригиналаанглийский
Страницы (с-по)315-318
Число страниц4
ЖурналJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
Том82
Номер выпуска5
DOI
СостояниеОпубликовано - 2015

    Предметные области Scopus

  • Атомная и молекулярная физика и оптика
  • Технология (все)
  • Вычислительная математика
  • Прикладная математика

ID: 86117363