DOI

This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.

Original languageEnglish
Pages (from-to)315-318
Number of pages4
JournalJournal of Optical Technology (A Translation of Opticheskii Zhurnal)
Volume82
Issue number5
DOIs
StatePublished - 2015

    Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Engineering(all)
  • Computational Mathematics
  • Applied Mathematics

ID: 86117363