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This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.
Original language | English |
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Pages (from-to) | 315-318 |
Number of pages | 4 |
Journal | Journal of Optical Technology (A Translation of Opticheskii Zhurnal) |
Volume | 82 |
Issue number | 5 |
DOIs | |
State | Published - 2015 |
ID: 86117363