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Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method. / Grigor'ev, L. V.; Nefedov, V. G.; Shakin, O. V.; MikhaѤlov, A. V.; Eliseev, E. N.

в: Journal of Optical Technology (A Translation of Opticheskii Zhurnal), Том 82, № 5, 2015, стр. 315-318.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Harvard

Grigor'ev, LV, Nefedov, VG, Shakin, OV, MikhaѤlov, AV & Eliseev, EN 2015, 'Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method', Journal of Optical Technology (A Translation of Opticheskii Zhurnal), Том. 82, № 5, стр. 315-318. https://doi.org/10.1364/JOT.82.000315

APA

Grigor'ev, L. V., Nefedov, V. G., Shakin, O. V., MikhaѤlov, A. V., & Eliseev, E. N. (2015). Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method. Journal of Optical Technology (A Translation of Opticheskii Zhurnal), 82(5), 315-318. https://doi.org/10.1364/JOT.82.000315

Vancouver

Grigor'ev LV, Nefedov VG, Shakin OV, MikhaѤlov AV, Eliseev EN. Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method. Journal of Optical Technology (A Translation of Opticheskii Zhurnal). 2015;82(5):315-318. https://doi.org/10.1364/JOT.82.000315

Author

Grigor'ev, L. V. ; Nefedov, V. G. ; Shakin, O. V. ; MikhaѤlov, A. V. ; Eliseev, E. N. / Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method. в: Journal of Optical Technology (A Translation of Opticheskii Zhurnal). 2015 ; Том 82, № 5. стр. 315-318.

BibTeX

@article{6c63a8f79c53466090178796e6a8d02b,
title = "Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method",
abstract = "This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.",
author = "Grigor'ev, {L. V.} and Nefedov, {V. G.} and Shakin, {O. V.} and MikhaѤlov, {A. V.} and Eliseev, {E. N.}",
note = "Publisher Copyright: {\textcopyright} 2015 Optical Society of America.",
year = "2015",
doi = "10.1364/JOT.82.000315",
language = "English",
volume = "82",
pages = "315--318",
journal = "Journal of Optical Technology (A Translation of Opticheskii Zhurnal)",
issn = "1070-9762",
publisher = "The Optical Society",
number = "5",

}

RIS

TY - JOUR

T1 - Study of the structural and optical properties of thin polycrystalline zinc oxide films obtained by the ion-plasma method

AU - Grigor'ev, L. V.

AU - Nefedov, V. G.

AU - Shakin, O. V.

AU - MikhaѤlov, A. V.

AU - Eliseev, E. N.

N1 - Publisher Copyright: © 2015 Optical Society of America.

PY - 2015

Y1 - 2015

N2 - This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.

AB - This paper presents the results of a study of thin polycrystalline films of zinc oxide, created using the new Elion technology-ion-plasma sputtering of a metallic target in the medium of a powerful gaseous oxidant. It is shown that the ion-plasma method can be used to synthesize thin polycrystalline films of zinc oxide with optical properties close to those of single-crystal zinc oxide. The optical properties of thin polycrystalline zinc oxide films synthesized by the ion-plasma method can be used as a light-sound guide of thin-film acoustooptic devices that operate on the basis of surface acoustic waves or UV photodetectors.

UR - http://www.scopus.com/inward/record.url?scp=84943146463&partnerID=8YFLogxK

U2 - 10.1364/JOT.82.000315

DO - 10.1364/JOT.82.000315

M3 - Article

AN - SCOPUS:84943146463

VL - 82

SP - 315

EP - 318

JO - Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

JF - Journal of Optical Technology (A Translation of Opticheskii Zhurnal)

SN - 1070-9762

IS - 5

ER -

ID: 86117363