Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method. / Sysoev, S. S.; Kudryavtsev, A. A.
в: Journal of Physics: Conference Series, Том 1328, № 1, 012073, 29.10.2019.Результаты исследований: Научные публикации в периодических изданиях › статья в журнале по материалам конференции › Рецензирование
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TY - JOUR
T1 - Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method
AU - Sysoev, S. S.
AU - Kudryavtsev, A. A.
PY - 2019/10/29
Y1 - 2019/10/29
N2 - The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.
AB - The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.
UR - http://www.scopus.com/inward/record.url?scp=85076232714&partnerID=8YFLogxK
U2 - 10.1088/1742-6596/1328/1/012073
DO - 10.1088/1742-6596/1328/1/012073
M3 - Conference article
AN - SCOPUS:85076232714
VL - 1328
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012073
T2 - 10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings
Y2 - 5 November 2018 through 8 November 2018
ER -
ID: 52197044