Standard

Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method. / Sysoev, S. S.; Kudryavtsev, A. A.

In: Journal of Physics: Conference Series, Vol. 1328, No. 1, 012073, 29.10.2019.

Research output: Contribution to journal › Conference article › peer-review

Harvard

Sysoev, SS & Kudryavtsev, AA 2019, 'Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method', Journal of Physics: Conference Series, vol. 1328, no. 1, 012073. https://doi.org/10.1088/1742-6596/1328/1/012073

APA

Sysoev, S. S., & Kudryavtsev, A. A. (2019). Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method. Journal of Physics: Conference Series, 1328(1), [012073]. https://doi.org/10.1088/1742-6596/1328/1/012073

Vancouver

Sysoev SS, Kudryavtsev AA. Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method. Journal of Physics: Conference Series. 2019 Oct 29;1328(1). 012073. https://doi.org/10.1088/1742-6596/1328/1/012073

Author

Sysoev, S. S. ; Kudryavtsev, A. A. / Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method. In: Journal of Physics: Conference Series. 2019 ; Vol. 1328, No. 1.

BibTeX

@article{b58fdb89b0c14205b945865a6e557e1d,
title = "Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method",
abstract = "The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.",
author = "Sysoev, {S. S.} and Kudryavtsev, {A. A.}",
year = "2019",
month = oct,
day = "29",
doi = "10.1088/1742-6596/1328/1/012073",
language = "English",
volume = "1328",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "IOP Publishing Ltd.",
number = "1",
note = "10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings ; Conference date: 05-11-2018 Through 08-11-2018",

}

RIS

TY - JOUR

T1 - Register impurities in the plasma forming gas helium in a large volume reactor using plasma electron spectroscopy method

AU - Sysoev, S. S.

AU - Kudryavtsev, A. A.

PY - 2019/10/29

Y1 - 2019/10/29

N2 - The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.

AB - The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.

UR - http://www.scopus.com/inward/record.url?scp=85076232714&partnerID=8YFLogxK

U2 - 10.1088/1742-6596/1328/1/012073

DO - 10.1088/1742-6596/1328/1/012073

M3 - Conference article

AN - SCOPUS:85076232714

VL - 1328

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012073

T2 - 10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings

Y2 - 5 November 2018 through 8 November 2018

ER -

ID: 52197044