TY - JOUR

T1 - Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors

T2 - III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems

AU - Sevast'yanova, T. N.

AU - Timoshkin, A. Yu

AU - Davydova, E. I.

AU - Dubov, O. V.

AU - Suvorov, A. V.

AU - Schaefer, Henry F.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

AB - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

UR - http://www.scopus.com/inward/record.url?scp=0037690253&partnerID=8YFLogxK

U2 - 10.1023/A:1023470301353

DO - 10.1023/A:1023470301353

M3 - Article

AN - SCOPUS:0037690253

VL - 73

SP - 48

EP - 53

JO - Russian Journal of General Chemistry

JF - Russian Journal of General Chemistry

SN - 1070-3632

IS - 1

ER -