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Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors : III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems. / Sevast'yanova, T. N.; Timoshkin, A. Yu; Davydova, E. I.; Dubov, O. V.; Suvorov, A. V.; Schaefer, Henry F.

In: Russian Journal of General Chemistry, Vol. 73, No. 1, 01.01.2003, p. 48-53.

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@article{37c114114f344155b2b337c3d13e4586,
title = "Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors: III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems",
abstract = "Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.",
author = "Sevast'yanova, {T. N.} and Timoshkin, {A. Yu} and Davydova, {E. I.} and Dubov, {O. V.} and Suvorov, {A. V.} and Schaefer, {Henry F.}",
year = "2003",
month = jan,
day = "1",
doi = "10.1023/A:1023470301353",
language = "English",
volume = "73",
pages = "48--53",
journal = "Russian Journal of General Chemistry",
issn = "1070-3632",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "1",

}

RIS

TY - JOUR

T1 - Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors

T2 - III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems

AU - Sevast'yanova, T. N.

AU - Timoshkin, A. Yu

AU - Davydova, E. I.

AU - Dubov, O. V.

AU - Suvorov, A. V.

AU - Schaefer, Henry F.

PY - 2003/1/1

Y1 - 2003/1/1

N2 - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

AB - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.

UR - http://www.scopus.com/inward/record.url?scp=0037690253&partnerID=8YFLogxK

U2 - 10.1023/A:1023470301353

DO - 10.1023/A:1023470301353

M3 - Article

AN - SCOPUS:0037690253

VL - 73

SP - 48

EP - 53

JO - Russian Journal of General Chemistry

JF - Russian Journal of General Chemistry

SN - 1070-3632

IS - 1

ER -

ID: 39238266