Research output: Contribution to journal › Article › peer-review
Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors : III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems. / Sevast'yanova, T. N.; Timoshkin, A. Yu; Davydova, E. I.; Dubov, O. V.; Suvorov, A. V.; Schaefer, Henry F.
In: Russian Journal of General Chemistry, Vol. 73, No. 1, 01.01.2003, p. 48-53.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Quantum-Chemical Study of Silicon Halide Adducts with Nitrogen-containing Donors
T2 - III. Energy Effects of Ammonolysis and Complex-Formation Reactions in Silicon Tetrahalide-Ammonia Systems
AU - Sevast'yanova, T. N.
AU - Timoshkin, A. Yu
AU - Davydova, E. I.
AU - Dubov, O. V.
AU - Suvorov, A. V.
AU - Schaefer, Henry F.
PY - 2003/1/1
Y1 - 2003/1/1
N2 - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.
AB - Thermodynamic characteristics of hydrogen halide elimination from SiX 4-NH3 systems were calculated by the B3LYP density functional method. The role of adducts and oligomeric forms of compounds containing Si-N bonds, as intermediates in the chemical vapor deposition of silicon nitride, was considered. It was shown experimentally that the reaction between silicon tetrachloride and ammonia in non-aqueous solvents involves ammonolysis.
UR - http://www.scopus.com/inward/record.url?scp=0037690253&partnerID=8YFLogxK
U2 - 10.1023/A:1023470301353
DO - 10.1023/A:1023470301353
M3 - Article
AN - SCOPUS:0037690253
VL - 73
SP - 48
EP - 53
JO - Russian Journal of General Chemistry
JF - Russian Journal of General Chemistry
SN - 1070-3632
IS - 1
ER -
ID: 39238266