DOI

  • V. A. Gritsenko
  • A. V. Shaposhnikov
  • Yu N. Novikov
  • A. P. Baraban
  • Hei Wong
  • G. M. Zhidomirov
  • M. Roger

It has been long suggested that the ≡SiOH defect is an electron or "water" trap in silicon dioxide based on some indirect evidences. In this work, quantum calculation on the capturing properties of non-bridging oxygen hole center with unpaired electron ≡SiO· and hydrogen defect ≡SiOH in silicon oxide are performed with the ab initio density-functional method. It was found that the ≡SiO· defect is an electron trap and this defect should be the responsible candidate for better hardness against radiation for the metal-oxide-semiconductor gate oxide produced by wet oxidation. We found that the ≡SiOH defect could not be an electron trap according to the present calculation results.

Язык оригиналаанглийский
Страницы (с-по)665-669
Число страниц5
ЖурналMicroelectronics Reliability
Том43
Номер выпуска4
DOI
СостояниеОпубликовано - 1 апр 2003

    Предметные области Scopus

  • Электроника, оптика и магнитные материалы
  • Атомная и молекулярная физика и оптика
  • Безопасность, риски, качество и надежность
  • Физика конденсатов
  • Поверхности, слои и пленки
  • Электротехника и электроника

ID: 41085838