Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
It has been long suggested that the ≡SiOH defect is an electron or "water" trap in silicon dioxide based on some indirect evidences. In this work, quantum calculation on the capturing properties of non-bridging oxygen hole center with unpaired electron ≡SiO· and hydrogen defect ≡SiOH in silicon oxide are performed with the ab initio density-functional method. It was found that the ≡SiO· defect is an electron trap and this defect should be the responsible candidate for better hardness against radiation for the metal-oxide-semiconductor gate oxide produced by wet oxidation. We found that the ≡SiOH defect could not be an electron trap according to the present calculation results.
| Язык оригинала | английский |
|---|---|
| Страницы (с-по) | 665-669 |
| Число страниц | 5 |
| Журнал | Microelectronics Reliability |
| Том | 43 |
| Номер выпуска | 4 |
| DOI | |
| Состояние | Опубликовано - 1 апр 2003 |
ID: 41085838