• V. A. Gritsenko
  • A. V. Shaposhnikov
  • Yu N. Novikov
  • A. P. Baraban
  • Hei Wong
  • G. M. Zhidomirov
  • M. Roger

It has been long suggested that the ≡SiOH defect is an electron or "water" trap in silicon dioxide based on some indirect evidences. In this work, quantum calculation on the capturing properties of non-bridging oxygen hole center with unpaired electron ≡SiO· and hydrogen defect ≡SiOH in silicon oxide are performed with the ab initio density-functional method. It was found that the ≡SiO· defect is an electron trap and this defect should be the responsible candidate for better hardness against radiation for the metal-oxide-semiconductor gate oxide produced by wet oxidation. We found that the ≡SiOH defect could not be an electron trap according to the present calculation results.

Original languageEnglish
Pages (from-to)665-669
Number of pages5
JournalMicroelectronics Reliability
Volume43
Issue number4
DOIs
StatePublished - 1 Apr 2003

    Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Safety, Risk, Reliability and Quality
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

ID: 41085838