Research output: Contribution to journal › Article › peer-review
It has been long suggested that the ≡SiOH defect is an electron or "water" trap in silicon dioxide based on some indirect evidences. In this work, quantum calculation on the capturing properties of non-bridging oxygen hole center with unpaired electron ≡SiO· and hydrogen defect ≡SiOH in silicon oxide are performed with the ab initio density-functional method. It was found that the ≡SiO· defect is an electron trap and this defect should be the responsible candidate for better hardness against radiation for the metal-oxide-semiconductor gate oxide produced by wet oxidation. We found that the ≡SiOH defect could not be an electron trap according to the present calculation results.
| Original language | English |
|---|---|
| Pages (from-to) | 665-669 |
| Number of pages | 5 |
| Journal | Microelectronics Reliability |
| Volume | 43 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1 Apr 2003 |
ID: 41085838