Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
Язык оригинала | английский |
---|---|
Номер статьи | 10 |
Страницы (с-по) | 1-10 |
Число страниц | 10 |
Журнал | Micromachines |
Том | 12 |
Номер выпуска | 1 |
DOI | |
Состояние | Опубликовано - янв 2021 |
ID: 73489348