Research output: Contribution to journal › Article › peer-review
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
| Original language | English |
|---|---|
| Article number | 10 |
| Pages (from-to) | 1-10 |
| Number of pages | 10 |
| Journal | Micromachines |
| Volume | 12 |
| Issue number | 1 |
| DOIs | |
| State | Published - Jan 2021 |
ID: 73489348