Research output: Contribution to journal › Article › peer-review
Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.
Original language | English |
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Article number | 10 |
Pages (from-to) | 1-10 |
Number of pages | 10 |
Journal | Micromachines |
Volume | 12 |
Issue number | 1 |
DOIs | |
State | Published - Jan 2021 |
ID: 73489348