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Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation. / Kukaev, Alexander; Lukyanov, Dmitry; Mikhailenko, Denis; Safronov, Daniil; Shevchenko, Sergey; Venediktov, Vladimir; Vlasov, Andrey.

в: Micromachines, Том 12, № 1, 10, 01.2021, стр. 1-10.

Результаты исследований: Научные публикации в периодических изданиях › статья › Рецензирование

Harvard

Kukaev, A, Lukyanov, D, Mikhailenko, D, Safronov, D, Shevchenko, S, Venediktov, V & Vlasov, A 2021, 'Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation', Micromachines, Том. 12, № 1, 10, стр. 1-10. https://doi.org/10.3390/mi12010010

APA

Kukaev, A., Lukyanov, D., Mikhailenko, D., Safronov, D., Shevchenko, S., Venediktov, V., & Vlasov, A. (2021). Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation. Micromachines, 12(1), 1-10. [10]. https://doi.org/10.3390/mi12010010

Vancouver

Kukaev A, Lukyanov D, Mikhailenko D, Safronov D, Shevchenko S, Venediktov V и пр. Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation. Micromachines. 2021 Янв.;12(1):1-10. 10. https://doi.org/10.3390/mi12010010

Author

Kukaev, Alexander ; Lukyanov, Dmitry ; Mikhailenko, Denis ; Safronov, Daniil ; Shevchenko, Sergey ; Venediktov, Vladimir ; Vlasov, Andrey. / Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation. в: Micromachines. 2021 ; Том 12, № 1. стр. 1-10.

BibTeX

@article{27873f9d34744947813f99d7fd6ae22e,
title = "Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation",
abstract = "Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.",
keywords = "Delay line, Laser, Solid-state microgyroscope, Surface acoustic wave, Topology",
author = "Alexander Kukaev and Dmitry Lukyanov and Denis Mikhailenko and Daniil Safronov and Sergey Shevchenko and Vladimir Venediktov and Andrey Vlasov",
note = "Funding Information: Funding: This research was funded by the Russian Science Foundation within the Grant # 20-19-00460 “Development of inertial sensors based on ring resonators”. Publisher Copyright: {\textcopyright} 2020 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.",
year = "2021",
month = jan,
doi = "10.3390/mi12010010",
language = "English",
volume = "12",
pages = "1--10",
journal = "Micromachines",
issn = "2072-666X",
publisher = "MDPI AG",
number = "1",

}

RIS

TY - JOUR

T1 - Formation of a complex topologies of saw-based inertial sensors by laser thin film local evaporation

AU - Kukaev, Alexander

AU - Lukyanov, Dmitry

AU - Mikhailenko, Denis

AU - Safronov, Daniil

AU - Shevchenko, Sergey

AU - Venediktov, Vladimir

AU - Vlasov, Andrey

N1 - Funding Information: Funding: This research was funded by the Russian Science Foundation within the Grant # 20-19-00460 “Development of inertial sensors based on ring resonators”. Publisher Copyright: © 2020 by the authors. Licensee MDPI, Basel, Switzerland. Copyright: Copyright 2020 Elsevier B.V., All rights reserved.

PY - 2021/1

Y1 - 2021/1

N2 - Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

AB - Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

KW - Delay line

KW - Laser

KW - Solid-state microgyroscope

KW - Surface acoustic wave

KW - Topology

UR - http://www.scopus.com/inward/record.url?scp=85098693643&partnerID=8YFLogxK

UR - https://www.mendeley.com/catalogue/95b0a4f8-2180-3441-9dbe-3cd411256859/

U2 - 10.3390/mi12010010

DO - 10.3390/mi12010010

M3 - Article

AN - SCOPUS:85098693643

VL - 12

SP - 1

EP - 10

JO - Micromachines

JF - Micromachines

SN - 2072-666X

IS - 1

M1 - 10

ER -

ID: 73489348