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DOI

It is demonstrated that detachment of electrons in the afterglow of an electronegative plasma can lead to a significant increase in negative wall potential with respect to the plasma potential. This effect can be used to modify the near-wall sheath electric field and thickness, which are important for plasma processing applications. Also in the afterglow, this effect can lead to an increase in electron density with time, and a reduction (up to total exclusion) in diffusion cooling of electrons and can thus be used to modify the electron temperature.

Язык оригиналаанглийский
Номер статьи021501
ЖурналApplied Physics Letters
Том89
Номер выпуска2
DOI
СостояниеОпубликовано - 2006

    Предметные области Scopus

  • Физика и астрономия (разное)

ID: 5040890