It is demonstrated that detachment of electrons in the afterglow of an electronegative plasma can lead to a significant increase in negative wall potential with respect to the plasma potential. This effect can be used to modify the near-wall sheath electric field and thickness, which are important for plasma processing applications. Also in the afterglow, this effect can lead to an increase in electron density with time, and a reduction (up to total exclusion) in diffusion cooling of electrons and can thus be used to modify the electron temperature.

Original languageEnglish
Article number021501
JournalApplied Physics Letters
Volume89
Issue number2
DOIs
StatePublished - 2006

    Research areas

  • electron detachment, plasma-wall interactions, afterglows, plasma sheaths, plasma density, plasma transport processes, plasma temperature

    Scopus subject areas

  • Physics and Astronomy (miscellaneous)

ID: 5040890