Using high aspect ratio AFM probe for digital twin development of SiC FEA

Original language	English
Title of host publication	34th International Vacuum Nanoelectronics Conference, IVNC 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Number of pages	2
ISBN (Electronic)	978-1-6654-2589-6
ISBN (Print)	978-1-6654-2590-2
DOIs	https://doi.org/10.1109/ivnc52431.2021.9600708
State	Published - 2021
Event	34th International Vacuum Nanoelectronics Conference, IVNC - Лион, France Duration: 5 Jul 2021 → 9 Jul 2021

Conference	34th International Vacuum Nanoelectronics Conference, IVNC
Abbreviated title	IVNC
Country/Territory	France
City	Лион
Period	5/07/21 → 9/07/21

ID: 86643966