• P.n. Butenko
  • R.b. Timashov
  • M.e. Boiko
  • L.i. Guzilova
  • S.v. Shapenkov
  • M.d. Sharkov
  • E.s. Sergienko
  • A.i. Stepanov
  • V.i. Nikolaev
Thick β-Ga2O3 homoepitaxial films have been grown on (2¯01) commercial substrates by mist-CVD with gallium acetylacetonate precursor for the first time. The growth rate of about 2 μm/h has been reached, which is unavailable for any other known epitaxial technique. The layer is characterized by the constant thickness and reasonable structure quality due to low stressed interface.
Original languageEnglish
Article number110970
Number of pages5
JournalMaterials Today Communications
Volume41
DOIs
StatePublished - 1 Dec 2024

    Research areas

  • Homoepitaxial films, Mist-CVD, Monoclinic gallium oxide, β-Ga2O3

ID: 127167304