Ссылки

DOI

  • P.n. Butenko
  • R.b. Timashov
  • M.e. Boiko
  • L.i. Guzilova
  • S.v. Shapenkov
  • M.d. Sharkov
  • E.s. Sergienko
  • A.i. Stepanov
  • V.i. Nikolaev
Thick β-Ga2O3 homoepitaxial films have been grown on (2¯01) commercial substrates by mist-CVD with gallium acetylacetonate precursor for the first time. The growth rate of about 2 μm/h has been reached, which is unavailable for any other known epitaxial technique. The layer is characterized by the constant thickness and reasonable structure quality due to low stressed interface.
Язык оригиналаанглийский
Номер статьи110970
Число страниц5
ЖурналMaterials Today Communications
Том41
DOI
СостояниеОпубликовано - 1 дек 2024

ID: 127167304