Standard
Test object for calibrating the transmission electron microscope. / Vasil'Ev, A. L.; Gavrilenko, V. P.; Koval'Chuk, M. V.; Mityukhlyaev, V. B.; Ozerin, Yu V.; Rakov, A. V.; Roddatis, V. V.; Todua, P. A.; Filippov, M. N.
In:
Russian Microelectronics, Vol. 42, No. 3, 05.2013, p. 155-159.
Research output: Contribution to journal › Article › peer-review
Harvard
Vasil'Ev, AL, Gavrilenko, VP
, Koval'Chuk, MV, Mityukhlyaev, VB, Ozerin, YV, Rakov, AV, Roddatis, VV, Todua, PA & Filippov, MN 2013, '
Test object for calibrating the transmission electron microscope',
Russian Microelectronics, vol. 42, no. 3, pp. 155-159.
https://doi.org/10.1134/S1063739713030098APA
Vasil'Ev, A. L., Gavrilenko, V. P.
, Koval'Chuk, M. V., Mityukhlyaev, V. B., Ozerin, Y. V., Rakov, A. V., Roddatis, V. V., Todua, P. A., & Filippov, M. N. (2013).
Test object for calibrating the transmission electron microscope.
Russian Microelectronics,
42(3), 155-159.
https://doi.org/10.1134/S1063739713030098Vancouver
Author
Vasil'Ev, A. L. ; Gavrilenko, V. P.
; Koval'Chuk, M. V. ; Mityukhlyaev, V. B. ; Ozerin, Yu V. ; Rakov, A. V. ; Roddatis, V. V. ; Todua, P. A. ; Filippov, M. N. /
Test object for calibrating the transmission electron microscope. In:
Russian Microelectronics. 2013 ; Vol. 42, No. 3. pp. 155-159.
BibTeX
@article{939fe307aa534c61a68fa6933aeadfcb,
title = "Test object for calibrating the transmission electron microscope",
abstract = "A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.",
author = "Vasil'Ev, {A. L.} and Gavrilenko, {V. P.} and Koval'Chuk, {M. V.} and Mityukhlyaev, {V. B.} and Ozerin, {Yu V.} and Rakov, {A. V.} and Roddatis, {V. V.} and Todua, {P. A.} and Filippov, {M. N.}",
note = "Funding Information: ACKNOWLEDGMENTS This study was supported by the Ministry of Educa tion and Science of the Russian Federation, state con tract no. 16.523.12.3005; using the Equipment of the Collective Use Centers of the Moscow Institute of Physics and Technology and the National Research Center of Surface and Vacuum Properties.",
year = "2013",
month = may,
doi = "10.1134/S1063739713030098",
language = "English",
volume = "42",
pages = "155--159",
journal = "Russian Microelectronics",
issn = "1063-7397",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "3",
}
RIS
TY - JOUR
T1 - Test object for calibrating the transmission electron microscope
AU - Vasil'Ev, A. L.
AU - Gavrilenko, V. P.
AU - Koval'Chuk, M. V.
AU - Mityukhlyaev, V. B.
AU - Ozerin, Yu V.
AU - Rakov, A. V.
AU - Roddatis, V. V.
AU - Todua, P. A.
AU - Filippov, M. N.
N1 - Funding Information:
ACKNOWLEDGMENTS This study was supported by the Ministry of Educa tion and Science of the Russian Federation, state con tract no. 16.523.12.3005; using the Equipment of the Collective Use Centers of the Moscow Institute of Physics and Technology and the National Research Center of Surface and Vacuum Properties.
PY - 2013/5
Y1 - 2013/5
N2 - A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.
AB - A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.
UR - http://www.scopus.com/inward/record.url?scp=84877768547&partnerID=8YFLogxK
U2 - 10.1134/S1063739713030098
DO - 10.1134/S1063739713030098
M3 - Article
AN - SCOPUS:84877768547
VL - 42
SP - 155
EP - 159
JO - Russian Microelectronics
JF - Russian Microelectronics
SN - 1063-7397
IS - 3
ER -
