• A. L. Vasil'Ev
  • V. P. Gavrilenko
  • M. V. Koval'Chuk
  • V. B. Mityukhlyaev
  • Yu V. Ozerin
  • A. V. Rakov
  • V. V. Roddatis
  • P. A. Todua
  • M. N. Filippov

A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.

Original languageEnglish
Pages (from-to)155-159
Number of pages5
JournalRussian Microelectronics
Volume42
Issue number3
DOIs
StatePublished - May 2013
Externally publishedYes

    Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

ID: 88210846