A new test object for calibrating the transmission electron microscope and scanning transmission microscope is suggested. The test was fabricated by means of cutting the silicon relief structure with the attested sizes of relief elements, which allowed us to use it both in the range of large magnifications (with the direct observation of the crystal lattice) and in the range of medium (near 30000) magnifications.
Original language | English |
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Pages (from-to) | 155-159 |
Number of pages | 5 |
Journal | Russian Microelectronics |
Volume | 42 |
Issue number | 3 |
DOIs | |
State | Published - May 2013 |
Externally published | Yes |
ID: 88210846