Study of the structure and parameters of a KrF excimer laser beam

Study of the structure and parameters of a KrF excimer laser beam. / Zadiranov, Yu. M.; Kalmykov, S. G.; Sasin, M. E.; Serdobintsev, P. Yu.

In: Technical Physics, Vol. 57, No. 12, 2012, p. 1681-1686.

Research output: Contribution to journal › Article

Zadiranov, YM, Kalmykov, SG, Sasin, ME & Serdobintsev, PY 2012, 'Study of the structure and parameters of a KrF excimer laser beam', Technical Physics, vol. 57, no. 12, pp. 1681-1686. https://doi.org/10.1134/S1063784212120298

Zadiranov, Y. M., Kalmykov, S. G., Sasin, M. E., & Serdobintsev, P. Y. (2012). Study of the structure and parameters of a KrF excimer laser beam. Technical Physics, 57(12), 1681-1686. https://doi.org/10.1134/S1063784212120298

Zadiranov, Yu. M. ; Kalmykov, S. G. ; Sasin, M. E. ; Serdobintsev, P. Yu. / Study of the structure and parameters of a KrF excimer laser beam. In: Technical Physics. 2012 ; Vol. 57, No. 12. pp. 1681-1686.

@article{672f8d00d245439abc434fc01edda73e,

title = "Study of the structure and parameters of a KrF excimer laser beam",

author = "Zadiranov, {Yu. M.} and Kalmykov, {S. G.} and Sasin, {M. E.} and Serdobintsev, {P. Yu.}",

year = "2012",

doi = "10.1134/S1063784212120298",

language = "English",

volume = "57",

pages = "1681--1686",

journal = "Technical Physics",

issn = "1063-7842",

publisher = "Pleiades Publishing",

number = "12",

}

TY - JOUR

T1 - Study of the structure and parameters of a KrF excimer laser beam

AU - Zadiranov, Yu. M.

AU - Kalmykov, S. G.

AU - Sasin, M. E.

AU - Serdobintsev, P. Yu.

PY - 2012

Y1 - 2012

U2 - 10.1134/S1063784212120298

DO - 10.1134/S1063784212120298

M3 - Article

VL - 57

SP - 1681

EP - 1686

JO - Technical Physics

JF - Technical Physics

SN - 1063-7842

IS - 12

ER -

ID: 5495184