Study of the structure and parameters of a KrF excimer laser beam › Научные исследования в СПбГУ

Study of the structure and parameters of a KrF excimer laser beam. / Zadiranov, Yu. M.; Kalmykov, S. G.; Sasin, M. E.; Serdobintsev, P. Yu.

в: Technical Physics, Том 57, № 12, 2012, стр. 1681-1686.

Результаты исследований: Научные публикации в периодических изданиях › статья

Zadiranov, YM, Kalmykov, SG, Sasin, ME & Serdobintsev, PY 2012, 'Study of the structure and parameters of a KrF excimer laser beam', Technical Physics, Том. 57, № 12, стр. 1681-1686. https://doi.org/10.1134/S1063784212120298

Zadiranov, Y. M., Kalmykov, S. G., Sasin, M. E., & Serdobintsev, P. Y. (2012). Study of the structure and parameters of a KrF excimer laser beam. Technical Physics, 57(12), 1681-1686. https://doi.org/10.1134/S1063784212120298

Zadiranov, Yu. M. ; Kalmykov, S. G. ; Sasin, M. E. ; Serdobintsev, P. Yu. / Study of the structure and parameters of a KrF excimer laser beam. в: Technical Physics. 2012 ; Том 57, № 12. стр. 1681-1686.

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title = "Study of the structure and parameters of a KrF excimer laser beam",

author = "Zadiranov, {Yu. M.} and Kalmykov, {S. G.} and Sasin, {M. E.} and Serdobintsev, {P. Yu.}",

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