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Study of the structure and parameters of a KrF excimer laser beam

Research output: Contribution to journal › Article

Centre for Physical Methods of Surface Investigation

DOI

https://doi.org/10.1134/S1063784212120298
Other version

Yu. M. Zadiranov
S. G. Kalmykov
M. E. Sasin
P. Yu. Serdobintsev

Original language	English
Pages (from-to)	1681-1686
Journal	Technical Physics
Volume	57
Issue number	12
DOIs	https://doi.org/10.1134/S1063784212120298
State	Published - 2012

ID: 5495184