Abstract: We demonstrate the possibility of selective-area growth of ordered arrays of GaN nanowires by molecular beam epitaxy on SiOx/Si substrates patterned by photolithography with microspherical lenses without the preliminary formation of seed layers. The effect of the substrate temperature on the morphological properties of the obtained arrays of nanowitres is studied. The optimal growth parameters ensuring the selective-area growth of GaN nanowires are experimentally found.

Original languageEnglish
Pages (from-to)1080-1083
Number of pages4
JournalTechnical Physics Letters
Volume46
Issue number11
DOIs
StatePublished - Nov 2020

    Scopus subject areas

  • Physics and Astronomy (miscellaneous)

    Research areas

  • GaN, microsphere lithography, molecular beam epitaxy, morphological properties, nanowires, selective-area growth

ID: 97045333