Research output: Contribution to journal › Article › peer-review
A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.
Original language | English |
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Pages (from-to) | 946-954 |
Number of pages | 9 |
Journal | Technical Physics |
Volume | 47 |
Issue number | 8 |
DOIs | |
State | Published - 1 Aug 2002 |
ID: 5123532