A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.

Original languageEnglish
Pages (from-to)946-954
Number of pages9
JournalTechnical Physics
Volume47
Issue number8
DOIs
StatePublished - 1 Aug 2002

    Scopus subject areas

  • Physics and Astronomy (miscellaneous)

ID: 5123532