Research output: Contribution to journal › Article › peer-review
Scaling laws for oxygen discharge plasmas. / Bogdanov, E. A.; Kolobov, V. I.; Kudryavtsev, A. A.; Tsendin, L. D.
In: Technical Physics, Vol. 47, No. 8, 01.08.2002, p. 946-954.Research output: Contribution to journal › Article › peer-review
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TY - JOUR
T1 - Scaling laws for oxygen discharge plasmas
AU - Bogdanov, E. A.
AU - Kolobov, V. I.
AU - Kudryavtsev, A. A.
AU - Tsendin, L. D.
N1 - Copyright: Copyright 2017 Elsevier B.V., All rights reserved.
PY - 2002/8/1
Y1 - 2002/8/1
N2 - A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.
AB - A fluid model is used to simulate ICP discharges in oxygen for a wide range of conditions under which commercial plasma-chemical reactors typically operate. Simple scaling laws are constructed with which different parameters of discharge plasmas in electronegative gases can be readily estimated from the given external parameters - the specific input power W and the product pL of the gas pressure and the characteristic plasma dimension.
UR - http://www.scopus.com/inward/record.url?scp=0035982644&partnerID=8YFLogxK
U2 - 10.1134/1.1501672
DO - 10.1134/1.1501672
M3 - Article
VL - 47
SP - 946
EP - 954
JO - Technical Physics
JF - Technical Physics
SN - 1063-7842
IS - 8
ER -
ID: 5123532