Research output: Contribution to journal › Conference article › peer-review
The results of this article show the possibility of determining the qualitative composition of impurities in buffer helium in a high-volume vacuum reactor by initiating a short glow in a small (non-working) part of this volume and using the PLES method.
| Original language | English |
|---|---|
| Article number | 012073 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1328 |
| Issue number | 1 |
| DOIs | |
| State | Published - 29 Oct 2019 |
| Event | 10th Republican Scientific Technical Conference on Low-Temperature Plasma During the Deposition of Functional Coatings - Kazan, Russian Federation Duration: 5 Nov 2018 → 8 Nov 2018 |
ID: 52197044