The technique of the determination of surface conditions of dielectric and semiconductor materials is described. The basis of this technique is dielectric spectrometry. An effective technique of the rapid analysis of the information about surface conditions has been proposed. This technique is based on the iteration Fourier analysis in the real time scale. The algorithm for the calculation of basic parameters of the surface under investigation has been described.

Original languageEnglish
Pages (from-to)1485-1495
Number of pages11
JournalSurface Investigation X-Ray, Synchrotron and Neutron Techniques
Volume15
Issue number10
StatePublished - 1 Dec 2000

    Scopus subject areas

  • Surfaces, Coatings and Films

ID: 52377517