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Preparation of carbonitride films in the active and afterglow phases of a glow discharge. / Grigorian, G.M.; Kochetov, I.V.

In: Plasma Physics Reports, Vol. 39, No. 5, 2013, p. 412-419.

Research output: Contribution to journal › Article › peer-review

Harvard

Grigorian, GM & Kochetov, IV 2013, 'Preparation of carbonitride films in the active and afterglow phases of a glow discharge', Plasma Physics Reports, vol. 39, no. 5, pp. 412-419. https://doi.org/10.1134/S1063780X1305005X

APA

Grigorian, G. M., & Kochetov, I. V. (2013). Preparation of carbonitride films in the active and afterglow phases of a glow discharge. Plasma Physics Reports, 39(5), 412-419. https://doi.org/10.1134/S1063780X1305005X

Vancouver

Grigorian GM, Kochetov IV. Preparation of carbonitride films in the active and afterglow phases of a glow discharge. Plasma Physics Reports. 2013;39(5):412-419. https://doi.org/10.1134/S1063780X1305005X

Author

Grigorian, G.M. ; Kochetov, I.V. / Preparation of carbonitride films in the active and afterglow phases of a glow discharge. In: Plasma Physics Reports. 2013 ; Vol. 39, No. 5. pp. 412-419.

BibTeX

@article{70afbe79448146b3b764e159e66a3862,
title = "Preparation of carbonitride films in the active and afterglow phases of a glow discharge",
author = "G.M. Grigorian and I.V. Kochetov",
year = "2013",
doi = "10.1134/S1063780X1305005X",
language = "English",
volume = "39",
pages = "412--419",
journal = "Plasma Physics Reports",
issn = "1063-780X",
publisher = "МАИК {"}Наука/Интерпериодика{"}",
number = "5",

}

RIS

TY - JOUR

T1 - Preparation of carbonitride films in the active and afterglow phases of a glow discharge

AU - Grigorian, G.M.

AU - Kochetov, I.V.

PY - 2013

Y1 - 2013

U2 - 10.1134/S1063780X1305005X

DO - 10.1134/S1063780X1305005X

M3 - Article

VL - 39

SP - 412

EP - 419

JO - Plasma Physics Reports

JF - Plasma Physics Reports

SN - 1063-780X

IS - 5

ER -

ID: 7407506