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Preparation of carbonitride films in the active and afterglow phases of a glow discharge

Research output: Contribution to journal › Article › peer-review

Department of Optics

DOI

https://doi.org/10.1134/S1063780X1305005X
Other version

G.M. Grigorian
I.V. Kochetov

Original language	English
Pages (from-to)	412-419
Journal	Plasma Physics Reports
Volume	39
Issue number	5
DOIs	https://doi.org/10.1134/S1063780X1305005X
State	Published - 2013

ID: 7407506