• N. V. Bazlov
  • A. M. Danishevskii
  • A. V. Derbin
  • I. S. Drachnev
  • I. M. Kotina
  • O. I. Konkov
  • A. M. Kuzmichev
  • M. S. Lasakov
  • M. V. Trushin
  • E. V. Unzhakov

Photoelectric properties of MIS tunnel diodes produced on high-resistive p-type silicon wafers with thin aluminium nitride AlN insulator layer and Pd or Al metal gate electrodes were investigated. It was found that synthesized AlN films possess a fixed positive charge, which leads to the creation of near-surface inversion layer in silicon substrate. The ratio of the photocurrent to the dark current K = Iph / Idark (on / off ratio) was found to depend on the gate electrode material, illumination intensity and the applied reverse bias. For studied MIS structures K ratio varied from 10 4 to 10 5 and was two orders of magnitude higher than that for the control MS structure without the insulator layer. High on / off ratio of such MIS structures with AlN tunnelling insulator promotes their application as an effective photodetectors in optoelectronics.

Original languageEnglish
Article number012181
JournalJournal of Physics: Conference Series
Volume1697
Issue number1
DOIs
StatePublished - 17 Dec 2020
EventInternational Conference PhysicA.SPb 2020 - ФТИ им. А.Ф. Иоффе, Санкт-Петербург, Russian Federation
Duration: 19 Oct 202023 Oct 2020
http://physica.spb.ru/
http://physica.spb.ru/archive/physicaspb2020/

    Scopus subject areas

  • Physics and Astronomy(all)

ID: 75066719