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Nanodisk fabrication by nanosphere lithography. / Lozhkina, O. A.; Lozhkin, M. S.; Kapitonov, Yu V.

State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects". Vol. 1748 American Institute of Physics, 2016. 030003.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Harvard

Lozhkina, OA, Lozhkin, MS & Kapitonov, YV 2016, Nanodisk fabrication by nanosphere lithography. in State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects". vol. 1748, 030003, American Institute of Physics, 5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, Saint Petersburg, Russian Federation, 26/04/16. https://doi.org/10.1063/1.4954349

APA

Lozhkina, O. A., Lozhkin, M. S., & Kapitonov, Y. V. (2016). Nanodisk fabrication by nanosphere lithography. In State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects" (Vol. 1748). [030003] American Institute of Physics. https://doi.org/10.1063/1.4954349

Vancouver

Lozhkina OA, Lozhkin MS, Kapitonov YV. Nanodisk fabrication by nanosphere lithography. In State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects". Vol. 1748. American Institute of Physics. 2016. 030003 https://doi.org/10.1063/1.4954349

Author

Lozhkina, O. A. ; Lozhkin, M. S. ; Kapitonov, Yu V. / Nanodisk fabrication by nanosphere lithography. State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects". Vol. 1748 American Institute of Physics, 2016.

BibTeX

@inproceedings{b43b86d428f1457e9474ea592c5f51f8,
title = "Nanodisk fabrication by nanosphere lithography",
abstract = "Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.",
author = "Lozhkina, {O. A.} and Lozhkin, {M. S.} and Kapitonov, {Yu V.}",
year = "2016",
month = jun,
day = "17",
doi = "10.1063/1.4954349",
language = "English",
volume = "1748",
booktitle = "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016",
publisher = "American Institute of Physics",
address = "United States",
note = "5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016 ; Conference date: 26-04-2016 Through 29-04-2016",
url = "http://www.globaleventslist.elsevier.com/events/2016/04/strann-2016-state-of-the-art-trends-of-scientific-research-of-artificial-and-natural-nanoobjects/, http://eibl.spbu.ru/strann-2016/",

}

RIS

TY - GEN

T1 - Nanodisk fabrication by nanosphere lithography

AU - Lozhkina, O. A.

AU - Lozhkin, M. S.

AU - Kapitonov, Yu V.

N1 - Conference code: 5

PY - 2016/6/17

Y1 - 2016/6/17

N2 - Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.

AB - Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.

UR - http://www.scopus.com/inward/record.url?scp=84984535290&partnerID=8YFLogxK

U2 - 10.1063/1.4954349

DO - 10.1063/1.4954349

M3 - Conference contribution

AN - SCOPUS:84984535290

VL - 1748

BT - State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016

PB - American Institute of Physics

T2 - 5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects

Y2 - 26 April 2016 through 29 April 2016

ER -

ID: 28209226