Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
Nanodisk fabrication by nanosphere lithography. / Lozhkina, O. A.; Lozhkin, M. S.; Kapitonov, Yu V.
State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016: Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects". Том 1748 American Institute of Physics, 2016. 030003.Результаты исследований: Публикации в книгах, отчётах, сборниках, трудах конференций › статья в сборнике материалов конференции › научная › Рецензирование
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TY - GEN
T1 - Nanodisk fabrication by nanosphere lithography
AU - Lozhkina, O. A.
AU - Lozhkin, M. S.
AU - Kapitonov, Yu V.
N1 - Conference code: 5
PY - 2016/6/17
Y1 - 2016/6/17
N2 - Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.
AB - Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.
UR - http://www.scopus.com/inward/record.url?scp=84984535290&partnerID=8YFLogxK
U2 - 10.1063/1.4954349
DO - 10.1063/1.4954349
M3 - Conference contribution
AN - SCOPUS:84984535290
VL - 1748
BT - State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016
PB - American Institute of Physics
T2 - 5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects
Y2 - 26 April 2016 through 29 April 2016
ER -
ID: 28209226