Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
Top-down fabrication of regular nanodisk arrays from an A3B5 epitaxial heterostructure containing quantum well is demonstrated. Dry ion etching through the mask was emloyed. The spin-coated monolayer of polystyrene nanospheres served as a mask. Nanodisk diameter could be precisely controlled by oxygen plasma resizing of spheres after deposition. Nanodisks with diameters down to 200 nm were made.
| Original language | English |
|---|---|
| Title of host publication | State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects, STRANN 2016 |
| Subtitle of host publication | Proceedings of the 5th International Conference "State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects" |
| Publisher | American Institute of Physics |
| Volume | 1748 |
| ISBN (Electronic) | 9780735414051 |
| DOIs | |
| State | Published - 17 Jun 2016 |
| Event | 5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects - Saint Petersburg, Russian Federation Duration: 26 Apr 2016 → 29 Apr 2016 Conference number: 5 http://www.globaleventslist.elsevier.com/events/2016/04/strann-2016-state-of-the-art-trends-of-scientific-research-of-artificial-and-natural-nanoobjects/ http://eibl.spbu.ru/strann-2016/ |
| Conference | 5th International Conference on State-of-the-Art Trends of Scientific Research of Artificial and Natural Nanoobjects |
|---|---|
| Abbreviated title | STRANN 2016 |
| Country/Territory | Russian Federation |
| City | Saint Petersburg |
| Period | 26/04/16 → 29/04/16 |
| Internet address |
ID: 28209226