| Original language | English |
|---|---|
| Pages | 40 |
| State | Published - 2014 |
| Externally published | Yes |
| Event | 12th International Baltic Conference on Atomic Layer Deposition - Helsinki, Finland Duration: 11 May 2014 → 13 May 2014 http://www.aldcoe.fi/bald2014/ |
| Conference | 12th International Baltic Conference on Atomic Layer Deposition |
|---|---|
| Country/Territory | Finland |
| City | Helsinki |
| Period | 11/05/14 → 13/05/14 |
| Internet address |
ID: 6814374