Research output

1. Features of SiO₂ Layers Synthesized on Silicon by Molecular Layer Deposition

   Research output: Contribution to journal › Article › peer-review

2. Особенности слоев SiO2, синтезированных на кремнии методом молекулярного наслаивания

   Research output: Contribution to journal › Article › peer-review

3. Electroluminescence of Ta2O5 Films Formed by Molecular Layer Deposition

   Research output: Contribution to journal › Article › peer-review

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