MEMS Accelerometer with SAW › SPbU Researchers Portal

MEMS Accelerometer with SAW

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review

Department of General Physics I

DOI

https://doi.org/10.1109/WECONF.2018.8604354
Final published version

V. G. Nefedov
O. V. Shakin
L. V. Grigoryev
I. S. Morozov
N. V. Zhuravlev

Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.

Original language	English
Title of host publication	2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781538676325
DOIs	https://doi.org/10.1109/WECONF.2018.8604354
State	Published - 7 Jan 2019
Event	2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018 - St. Petersburg, Russian Federation Duration: 26 Nov 2018 → 30 Nov 2018

Publication series

Name	2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018

Conference

Conference	2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018
Country/Territory	Russian Federation
City	St. Petersburg
Period	26/11/18 → 30/11/18

Scopus subject areas

Computer Networks and Communications
Information Systems

Research areas

MEMS technology, microaccelerometer with SAW, slaser stimulated plasma etching

ID: 86116180