Standard
MEMS Accelerometer with SAW. / Nefedov, V. G.; Shakin, O. V.; Grigoryev, L. V.; Morozov, I. S.; Zhuravlev, N. V.
2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018. Institute of Electrical and Electronics Engineers Inc., 2019. 8604354 (2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018).
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Research › peer-review
Harvard
Nefedov, VG, Shakin, OV
, Grigoryev, LV, Morozov, IS & Zhuravlev, NV 2019,
MEMS Accelerometer with SAW. in
2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018., 8604354, 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018, Institute of Electrical and Electronics Engineers Inc., 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018, St. Petersburg, Russian Federation,
26/11/18.
https://doi.org/10.1109/WECONF.2018.8604354APA
Nefedov, V. G., Shakin, O. V.
, Grigoryev, L. V., Morozov, I. S., & Zhuravlev, N. V. (2019).
MEMS Accelerometer with SAW. In
2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018 [8604354] (2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018). Institute of Electrical and Electronics Engineers Inc..
https://doi.org/10.1109/WECONF.2018.8604354Vancouver
Author
Nefedov, V. G. ; Shakin, O. V.
; Grigoryev, L. V. ; Morozov, I. S. ; Zhuravlev, N. V. /
MEMS Accelerometer with SAW. 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018. Institute of Electrical and Electronics Engineers Inc., 2019. (2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018).
BibTeX
@inproceedings{eecd0cd92c81450697caa234500018b6,
title = "MEMS Accelerometer with SAW",
abstract = "Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.",
keywords = "MEMS technology, microaccelerometer with SAW, slaser stimulated plasma etching",
author = "Nefedov, {V. G.} and Shakin, {O. V.} and Grigoryev, {L. V.} and Morozov, {I. S.} and Zhuravlev, {N. V.}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018 ; Conference date: 26-11-2018 Through 30-11-2018",
year = "2019",
month = jan,
day = "7",
doi = "10.1109/WECONF.2018.8604354",
language = "English",
series = "2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018",
address = "United States",
}
RIS
TY - GEN
T1 - MEMS Accelerometer with SAW
AU - Nefedov, V. G.
AU - Shakin, O. V.
AU - Grigoryev, L. V.
AU - Morozov, I. S.
AU - Zhuravlev, N. V.
N1 - Publisher Copyright:
© 2018 IEEE.
PY - 2019/1/7
Y1 - 2019/1/7
N2 - Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.
AB - Was created the model of a microaccelerometer using MEMS technology. Were investigated the sensitivity and non-linear properties of the MEMS sensor in the commercial temperature range.
KW - MEMS technology
KW - microaccelerometer with SAW
KW - slaser stimulated plasma etching
UR - http://www.scopus.com/inward/record.url?scp=85061767935&partnerID=8YFLogxK
U2 - 10.1109/WECONF.2018.8604354
DO - 10.1109/WECONF.2018.8604354
M3 - Conference contribution
AN - SCOPUS:85061767935
T3 - 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018
BT - 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2018 Wave Electronics and its Application in Information and Telecommunication Systems, WECONF 2018
Y2 - 26 November 2018 through 30 November 2018
ER -
