This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

Original languageEnglish
Title of host publicationSpringer Series in Advanced Microelectronics
PublisherSpringer Nature
Pages43-114
Number of pages72
DOIs
StatePublished - 1 Jan 2017

Publication series

NameSpringer Series in Advanced Microelectronics
Volume60
ISSN (Print)1437-0387

    Scopus subject areas

  • Electrical and Electronic Engineering

ID: 49549463