DOI

This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

Язык оригиналаанглийский
Название основной публикацииSpringer Series in Advanced Microelectronics
ИздательSpringer Nature
Страницы43-114
Число страниц72
DOI
СостояниеОпубликовано - 1 янв 2017

Серия публикаций

НазваниеSpringer Series in Advanced Microelectronics
Том60
ISSN (печатное издание)1437-0387

    Предметные области Scopus

  • Электротехника и электроника

ID: 49549463