Research output: Chapter in Book/Report/Conference proceeding › Chapter › Research › peer-review
Experimental equipment and technique. / Egorov, Nikolay; Sheshin, Evgeny.
Springer Series in Advanced Microelectronics. Springer Nature, 2017. p. 43-114 (Springer Series in Advanced Microelectronics; Vol. 60).Research output: Chapter in Book/Report/Conference proceeding › Chapter › Research › peer-review
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TY - CHAP
T1 - Experimental equipment and technique
AU - Egorov, Nikolay
AU - Sheshin, Evgeny
PY - 2017/1/1
Y1 - 2017/1/1
N2 - This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.
AB - This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.
UR - http://www.scopus.com/inward/record.url?scp=85020226793&partnerID=8YFLogxK
U2 - 10.1007/978-3-319-56561-3_2
DO - 10.1007/978-3-319-56561-3_2
M3 - Chapter
AN - SCOPUS:85020226793
T3 - Springer Series in Advanced Microelectronics
SP - 43
EP - 114
BT - Springer Series in Advanced Microelectronics
PB - Springer Nature
ER -
ID: 49549463