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Experimental equipment and technique. / Egorov, Nikolay; Sheshin, Evgeny.

Springer Series in Advanced Microelectronics. Springer Nature, 2017. p. 43-114 (Springer Series in Advanced Microelectronics; Vol. 60).

Research output: Chapter in Book/Report/Conference proceedingChapterResearchpeer-review

Harvard

Egorov, N & Sheshin, E 2017, Experimental equipment and technique. in Springer Series in Advanced Microelectronics. Springer Series in Advanced Microelectronics, vol. 60, Springer Nature, pp. 43-114. https://doi.org/10.1007/978-3-319-56561-3_2

APA

Egorov, N., & Sheshin, E. (2017). Experimental equipment and technique. In Springer Series in Advanced Microelectronics (pp. 43-114). (Springer Series in Advanced Microelectronics; Vol. 60). Springer Nature. https://doi.org/10.1007/978-3-319-56561-3_2

Vancouver

Egorov N, Sheshin E. Experimental equipment and technique. In Springer Series in Advanced Microelectronics. Springer Nature. 2017. p. 43-114. (Springer Series in Advanced Microelectronics). https://doi.org/10.1007/978-3-319-56561-3_2

Author

Egorov, Nikolay ; Sheshin, Evgeny. / Experimental equipment and technique. Springer Series in Advanced Microelectronics. Springer Nature, 2017. pp. 43-114 (Springer Series in Advanced Microelectronics).

BibTeX

@inbook{2d5484c6a4f3410aa23c50c5c737dc21,
title = "Experimental equipment and technique",
abstract = "This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.",
author = "Nikolay Egorov and Evgeny Sheshin",
year = "2017",
month = jan,
day = "1",
doi = "10.1007/978-3-319-56561-3_2",
language = "English",
series = "Springer Series in Advanced Microelectronics",
publisher = "Springer Nature",
pages = "43--114",
booktitle = "Springer Series in Advanced Microelectronics",
address = "Germany",

}

RIS

TY - CHAP

T1 - Experimental equipment and technique

AU - Egorov, Nikolay

AU - Sheshin, Evgeny

PY - 2017/1/1

Y1 - 2017/1/1

N2 - This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

AB - This chapter presents the field emission electron microscope, its technical characteristics and various modern construction of microscopes. A particular attention is paid to analyzing full energies of the electrons and universal constructions of field electron microscopes that are the main branch of development of microscopy and spectroscopy. The most popular practical techniques of manufacture of tip field emitters from different materials.

UR - http://www.scopus.com/inward/record.url?scp=85020226793&partnerID=8YFLogxK

U2 - 10.1007/978-3-319-56561-3_2

DO - 10.1007/978-3-319-56561-3_2

M3 - Chapter

AN - SCOPUS:85020226793

T3 - Springer Series in Advanced Microelectronics

SP - 43

EP - 114

BT - Springer Series in Advanced Microelectronics

PB - Springer Nature

ER -

ID: 49549463